Module Specification
The information contained in this module specification was correct at the time of publication but may be subject to change, either during the session because of unforeseen circumstances, or following review of the module at the end of the session. Queries about the module should be directed to the member of staff with responsibility for the module.
Title Plasma System Engineering
Code ELEC391
Coordinator Professor JW Bradley
Electrical Engineering and Electronics
J.W.Bradley@liverpool.ac.uk
Year CATS Level Semester CATS Value
Session 2022-23 Level 6 FHEQ First Semester 7.5

Aims

To develop an appreciation and understanding of industrial plasma discharges and associated engineering.

Pre-requisites before taking this module (other modules and/or general educational/academic requirements):
 

Co-requisite modules:
 

Learning Outcomes

(LO1) Apply knowledge in the analysis of plasma creation and sustainment, its basic physical properties, its interaction with substrates and its use to produce desired technological outcomes.

(S1) After successful completion of the module, the student should be able to: Calculate plasma characteristics, predit the energy and flux at the boundary region of material surfaces; Calculate the desposition, etch and sputter rates of substrates in different types of plasma; To design a number of simple power supply circuits relevant to technology plasma creation; To design a simple plasma system for particular technological applications.

(S2) After successful completion of the module, the student should be able to: Apply their knowledge in the analysis of plasma creation and sustainment , its basic physical properties, its interaction with substrates and its use to produce desired technological outcomes.

(S3) To demonstrate knowledge and understanding of the basic physical properties in plasmas relevant to industry and the uses for industrial plasma technology.

Syllabus
 

Lecture 1: Introduction to the plasma state. What is a plasma? What is plasma engineering?

Lecture 2: Some basics: The idea of Debye screening, temperature, ionisation fraction, calculation of fluxes.

Lecture 3: What Plasma breakdown and sustainment- Plasma as a conductor.

Lecture 4: Plasma boundary phenomena, Bohm criterion, basic concepts of sputtering, etching and deposition, relation to Si wafer processing and micro-electronics manufacture.

Lecture 5- 8: Low pressure plasma systems (RF relative ion etching, magnetron deposition, inductive sources) for micro-electronics fabrication.

Lecture 9-10: Atmospheric plasmas (corona, DBD) and their industrial applications including methods for nanotechnology.

Lecture 11 : Power delivery methods.

Lecture 12: Novel applications: spacecraft thrusters, food hygiene, plasma medicine.

Teaching and Learning Strategies

Due to Covid-19, one or more of the following delivery methods will be implemented based on the current local conditions and the situation of registered students. It is anticipated that both a) & b) will be in operation for semester 1..
(a) Hybrid delivery, with social distancing on Campus
Teaching Method 1 - On-line asynchronous lectures
Description: Lectures to explain the material
Attendance Recorded: No
Notes: On average one per week

Teaching Method 2 - Synchronous face to face tutorials
Description: Tutorials on the Assignments and Problem Sheets
Attendance Recorded: Yes
Notes: On average one per fortnight

(b) Fully online delivery and assessment
Teaching Method 1 - On-line asynchronous lectures
Description: Lectures to explain the material
Attendance Recorded: No
Notes: On average one per week

Teaching Method 2 - On-line synchronous tutorials
Description: Tutorials on the Assignments and Problem Sheets
Attendance Recorded: Yes
Notes: On average one per fortnight

(c) Standard on-campus delivery with minimal social distancing
Teaching Method 1 - Lecture
Description: Lectures to explain the material
Attendance Recorded: Yes
Notes: On average one per week

Teaching Method 2 - Tutorial
Description: Tutorials on the Assignments and Problem Sheets
Attendance Recorded: Yes
Notes: On average one per fortnight

Teaching Schedule
  Lectures Seminars Tutorials Lab Practicals Fieldwork Placement Other TOTAL
Study Hours 12

   6

       18
Timetable (if known)              
Private Study 57
TOTAL HOURS 75

Assessment
EXAM Duration Timing
(Semester)		 % of
final
mark		 Resit/resubmission
opportunity		 Penalty for late
submission		 Notes
(391) Final exam. This is an anonymous assessment. There is a resit opportunity for final year students who have extenuating circumstances.  2    100       
CONTINUOUS Duration Timing
(Semester)		 % of
final
mark		 Resit/resubmission
opportunity		 Penalty for late
submission		 Notes
             

Reading List
Reading lists are managed at readinglists.liverpool.ac.uk. Click here to access the reading lists for this module.